• Micromachining
• Microlithography
• Laser scribing
• Photoablation

• For UV excimer & high-power YAG
• Long working distance
• All refractive models
• UV achromatic models
• Video monitoring

Modern industrial laser applications impose stringent demands on the microscope objective. Cemented elements and oil-immersed lenses severely limit the utility of the traditional objective with high-power UV and IR lasers.

With lens elements made in excimer-grade materials (fused silica and CaF2), OFR's MicroSpot Focusing Objectives are designed for use with UV, Visible, IR or high-power YAG lasers. Micro-Spot Objectives are increasingly used for micromachining, laser scribing and microlithography.

An important feature of OFR MicroSpot Objectives is long working distance, the advantage of which is to minimize vapor deposition on the first lens surface resulting from ablated material. Also, this extra space allows insertion of protective windows, tools and other devices.

MicroSpot Focusing Objectives, designed and manufactured by OFR since 1988

DESIGNED FOR UV AND HIGH POWER

Traditional microscope objectives are designed for direct imaging by the eye. Because they contain high-index flint glasses, cemented interfaces or oil-immersed lenses, they are limited to low-power, visible spectrum applications. In contrast, OFR MicroSpot Focusing Objectives do not use cemented interfaces, and thus are well suited for high-power UV and YAG lasers.

The lens elements in OFR LMU and LMUL Series UV Achromatic Objectives are made of excimer-grade fused silica and CaF2, resulting in superior performance with high-power excimer lasers. All lenses are air-spaced.

Lenses in the LMH Series YAG Laser Objectives are made of the same fused silica as OFR high-power YAG Laser Lenses (See PRECISION OPTICAL COMPONENTS catalog). With high-energy damage resistant AR coatings, LMH Objectives are designed for use with high power YAG lasers.

Short working distances of traditional objectives create problems in ablative applications (such as laser trimming or semi-conductor circuit shaping). OFR LMU UV Achromatic Objectives have long working distances that help to minimize vapor deposition on the front lens surface. For extreme cases, the LMUL Ultra-Long Objective has the longest working distance for its magnification.

All OFR MicroSpot Objectives are designed for use with a collimated laser beam, that is, they are infinite conjugate objectives.

The LMU objectives are precision optical components. Do not disassemble. Disassembly will viod the warranty.